Shono Laboratory


  1. Clean Room Laboratory
  2. UV Lithography
  3. Reactive Ion Etching (RIE)
  4. RF Sputtering Ion Shower
  5. Low Pressure Chemical Vapor Deposition
  6. Thermal Oxidation Furnace
  7. Clean Benches
  8. Spin Coaters
  9. E-beam Evaporation
  10. Thermal Vacuum Evaporator
  11. Yellow Room Facility